Stephen Y. Chou


Stephen Y. Chou
Associated organizations
Princeton University
Fields of study


Dr. Stephen Y. Chou's pioneer research on a broad variety of nanotechnologies and nanodevices has helped to shape new paths in the fields of nanofabrication, nanoscale electronics, optoelectronics, magnetics and materials. His graduate work used X-ray lithography to scale MOSFETs to the 60 nm range, and since 1984, he has demonstrated very small MOSFETs, single electron transistors, nanophotonic devices, and nanomagnetic devices. His development of nanoimprint lithography (NIL) since 1994 gave rise to a revolutionary method that allows 10 nm patterning over large areas with high throughput and low cost, providing a key enabling tool for nanotechnology. An IEEE and Packard Fellow, Dr. Chou has published more than 280 papers and holds eight U.S. patents. His work has been cited over 3000 times by other scientific journal papers. Since 1997, he has been the Joseph C. Elgin Professor of Electrical Engineering and head of the NanoStructure Laboratory at Princeton University, Princeton, New Jersey.