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First-Hand:The Birth of Glow Discharge Chemistry (aka PECVD) (section The Birth of Glow Discharge Chemistry for Inorganic Thin Films)
History of STL' by Vi Maile. This chapter is focused on the birth of glow discharge chemistry, at STL leading to the deposition of a range of materials

113 KB (5,483 words) - 14:36, 17 March 2015