Special:Badtitle/NS90:«no subject» (4)
As a nonimiator, modification of citation based on discussion with Dr. Eiichi Ohno is proposed here. The biggest change is in the latter half of the citation showing actual application fields of field emission electron microscopes, rather than mere enumeration of various kinds electron microscopes such as FE-SEM, FE-TEM, FE-STEM and CD-SEM. We hope this change will be effective for people to understand the social contribution of this technology. With some amendments, the modified citation became 66 words from 70 in the original.
Citation of First Practical Field Emission Electron Microscope, 1972-1984
[Original] 70 words
Hitachi developed practical field emission electron source technology, under collaboration with Dr. Crewe (University of Chicago) and constructed the world’s first commercial FE-SEM (field emission scanning electron microscope) in 1972. The field emission technology enabled stable and reliable ultra-high-resolution imaging. Field emission electron microscopes, i.e., FE-SEMs, FE-TEMs, FE-STEMs and critical dimension SEMs (1984) are now widely used for advanced research and development in many fields of science, technology and industry.
[Modified] 66 words
Hitachi developed practical field emission electron source technology, under collaboration with Dr. Crewe (University of Chicago) and commercialized the world’s first field emission scanning electron microscope in 1972. This technology enabled stable and reliable ultrahigh resolution imaging and realized high performance electron microscopes. The field emission electron microscopes have been contributing to the progress in science, technology and industry, such as physics, biology and semiconductor devices.