- Associated organizations
- ETH Zurich
- Fields of study
Microfabrication processes for chemical and biochemical sensors hold the potential to produce one or thousands of devices of micrometer and millimeter dimensions. This ability to fabricate many of these devices in parallel leads to tremendous cost savings and enables the production of array structures or large device series with minute fabrication tolerances. The paper "Microfabrication Techniques for Chemical/Biosensors" published in the June 2003 issue of the Proceedings of the IEEE by Henry Baltes, Oliver Brand, Christoph Hagleitner and Andreas Hierlemann will be a valued reference to those involved in microfabrication for the foreseeable future. Originally asked to describe how microfabrication technology applies to chemical microsensors, the authors exceeded all expectations by crafting a powerful review that describes, compares and contrasts the principal approaches to microsensor technology, identifies them with their appropriate microfabrication technologies, and provides wide-ranging examples of each from numerous research groups. The paper provides a sound outline of fundamental chemical sensor principles,a definitive review of the advantages and disadvantages of fabricating devices via IC fabrication technology, a description of various microfabrication process flows, and a look at monolithic, integrated chemical and biological microsensor systems.
Dr. Oliver Brand is an associate professor in the School of Electrical and Computer Engineering at the Georgia Institute of Technology in Atlanta. His research interests are in the areas of CMOS-based microsystems, microsensors for physical, chemical and biological measurement, MEMS fabrication technologies, and microsystems packaging. His focus has been on the development of microsensors and microactuators using industrial IC processes in combination with post-processing micromachining steps. Previously, he was a lecturer and deputy director of the Physical Electronics Laboratory at ETH Zurich. A Senior Member of the IEEE, Dr. Brand is the co-author of three books and more than 100 publications in scientific journals and conference proceedings, and a co-editor of the book series "Advanced Micro and Nanosystems."